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Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998
National Institute of Standards and Technology, Gaithersburg MD, USA, 2 Bde, AIP Conference Proceedings 449
ISBN/EAN: 9781563967535
Umbreit-Nr.: 4623316
Sprache:
Englisch
Umfang:
Format in cm:
Einband:
Keine Angabe
Erschienen am 01.12.1998
Auflage: 1/1998
- Zusatztext
- The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.